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1

SiOF and SiO2 deposition in a HDP reactor: tool characterization and film analysis

D.J Den Boer, H Fukuda, J Helmig, J.B.C Van Der Hilst, G.C.A.M Janssen, A.J Kalkman, S Radelaar

Journal:

Microelectronics Reliability

Year:

1998

Language:

english

File:

PDF, 1.23 MB

english, 1998

2

The Influence of Temperature Gradients on Partial Pressures in a Cvd Reactor

Oosterlaken, T.G.M., Leusink, G.J., Janssen, G.C.A.M., Radelaar, S., Kuijlaars, K.J., Kleijn, C.R., Van Den Akker, H.E.A.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 340 KB

english, 1993

3

Deformation bands in hard rolled copper foils

M.J. Druyvesteyn, F.T. Klosterman, J. Roos, P.M. Van Dijk, P. Los, S. Radelaar

Journal:

Journal of the Mechanics and Physics of Solids

Year:

1964

Language:

english

File:

PDF, 926 KB

english, 1964

4

Additional X-ray and electron diffraction peaks of polycrystalline silicon films

M. Hendriks, S. Radelaar, A.M. Beers, J. Bloem

Journal:

Thin Solid Films

Year:

1984

Language:

english

File:

PDF, 801 KB

english, 1984

5

The influence of the passivation material on stress voiding in Al–Cu alloys

J.P Lokker, G.C.A.M Janssen, S Radelaar

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 1.46 MB

english, 2000

6

Study of growth kinetics in silicon gas source molecular beam epitaxy with disilane using RHEED intensity oscillations

S. Butzke, K. Werner, J. Trommel, S. Radelaar, P. Balk

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 431 KB

english, 1993

7

Phase transformations in Al–Cu thin films: precipitation and copper redistribution

J.P. Lokker, A.J. Böttger, W.G. Sloof, F.D. Tichelaar, G.C.A.M. Janssen, S. Radelaar

Journal:

Acta Materialia

Year:

2001

Language:

english

File:

PDF, 707 KB

english, 2001

8

Fe. I. Determination of the long-range-order parameter

Drijver, J. W., van der Woude, F., Radelaar, S.

Journal:

Physical Review B

Year:

1977

Language:

english

File:

PDF, 536 KB

english, 1977

9

Amorphous to crystalline transformation of

Schaafsma, A. S., Snijders, H., van der Woude, F., Drijver, J. W., Radelaar, S.

Journal:

Physical Review B

Year:

1979

Language:

english

File:

PDF, 467 KB

english, 1979

10

Weak localization in short one-dimensional channels contacted by two-dimensional probes

de Graaf, C., Caro, J., Radelaar, S.

Journal:

Physical Review B

Year:

1992

Language:

english

File:

PDF, 234 KB

english, 1992

11

Growth kinetics and inhibition of growth of chemical vapor deposited thin tungsten films on silicon from tungsten hexafluoride

Leusink, G. J., Kleijn, C. R., Oosterlaken, T. G. M., Janssen, G. C. A. M., Radelaar, S.

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 1.37 MB

english, 1992

12

Fe. II. The order-disorder transition

Drijver, J. W., van der Woude, F., Radelaar, S.

Journal:

Physical Review B

Year:

1977

Language:

english

File:

PDF, 506 KB

english, 1977

13

Correlation energy of conductance fluctuations in ballistic silver point contacts

Holweg, P. A. M., Caro, J., Verbruggen, A. H., Radelaar, S.

Journal:

Physical Review B

Year:

1993

Language:

english

File:

PDF, 299 KB

english, 1993

14

Superconductivity and localization in thin polycrystalline tungsten-germanium films

Bakker, S. J. M., Jaeger, H. M., Klapwijk, T. M., van der Drift, E., Radelaar, S.

Journal:

Physical Review B

Year:

1993

Language:

english

File:

PDF, 177 KB

english, 1993

15

Lateral-superlattice effect on weak localization in silicon inversion layers

Gao, J. R., de Graaf, C., Schüssler, A. S., Caro, J., Radelaar, S., Heyers, K.

Journal:

Physical Review B

Year:

1992

Language:

english

File:

PDF, 251 KB

english, 1992

16

Clustering in Cu-Ni alloys: A diffuse neutron-scattering study

Vrijen, J., Radelaar, S.

Journal:

Physical Review B

Year:

1978

Language:

english

File:

PDF, 759 KB

english, 1978

17

Epitaxial growth of bismuth films and bismuth-antimony heterostructures

van Hulst, J. A., Jaeger, H. M., Radelaar, S.

Journal:

Physical Review B

Year:

1995

Language:

english

File:

PDF, 750 KB

english, 1995

18

Ballistic electron transport and two-level resistance fluctuations in noble-metal nanobridges

Holweg, P. A. M., Caro, J., Verbruggen, A. H., Radelaar, S.

Journal:

Physical Review B

Year:

1992

Language:

english

File:

PDF, 480 KB

english, 1992

19

Conductance of two-dimensional disordered Voronoi networks

Priolo, A., Jaeger, H. M., Dammers, A. J., Radelaar, S.

Journal:

Physical Review B

Year:

1992

Language:

english

File:

PDF, 208 KB

english, 1992

20

Neutron scattering study on the kinetics of clustering in CuNi alloys

Vrijen, J., Aalders, J., van Dijk, C., Radelaar, S.

Journal:

Physical Review B

Year:

1980

Language:

english

File:

PDF, 858 KB

english, 1980

21

Neutron scattering study on decomposition in Cu-Ni-Fe alloys

Aalders, J., van Dijk, C., Radelaar, S.

Journal:

Physical Review B

Year:

1984

Language:

english

File:

PDF, 871 KB

english, 1984

22

Thermal-stress-induced averaging of the Aharonov-Bohm oscillations in submicrometer Au loops

Verbruggen, A. H., Vloeberghs, H., Holweg, P. A. M., Van Haesendonck, C., Radelaar, S., Bruynseraede, Y.

Journal:

Physical Review B

Year:

1992

Language:

english

File:

PDF, 251 KB

english, 1992

23

Observation of carrier-concentration-dependent reflectionless tunneling in a superconductor–two-dimensional-electron-gas–superconductor structure

Bakker, S. J. M., van der Drift, E., Klapwijk, T. M., Jaeger, H. M., Radelaar, S.

Journal:

Physical Review B

Year:

1994

Language:

english

File:

PDF, 218 KB

english, 1994

24

High Depth Resolution SIMS Analysis with Low-energy Grazing O2+ Beams

Jiang, Zhi-Xiong, Alkemade, Paul F. A., Algra, Eelke, Radelaar, S.

Journal:

Surface and Interface Analysis

Year:

1997

Language:

english

File:

PDF, 334 KB

english, 1997

25

On Liesegang bands in internally oxidized AgCd-based ternary alloys

V.A van Rooijen, E.W van Royen, J Vrijen, S Radelaar

Journal:

Acta Metallurgica

Year:

1975

Language:

english

File:

PDF, 1.15 MB

english, 1975

26

On the kinetics of structural relaxation in metallic glasses

A. Van Den Beukel, S. Radelaar

Journal:

Acta Metallurgica

Year:

1983

Language:

english

File:

PDF, 979 KB

english, 1983

27

Flux line shear studied in artificially structured superconducting double layers

A. Pruymboom, P.H. Kes, E. van der Drift, S. Radelaar

Journal:

Year:

1989

Language:

english

File:

PDF, 439 KB

english, 1989

28

Comparative study of molecular beam injection systems for gas source molecular beam epitaxy

D.A. Scheinowitz, J. Trommel, K. Werner, S. Radelaar, P. Balk

Journal:

Journal of Crystal Growth

Year:

1993

Language:

english

File:

PDF, 326 KB

english, 1993

29

Evidence for non-hydrogen desorption limited growth of Si from disilane at very low temperatures in gas source molecular beam epitaxy?

K. Werner, S. Butzke, S. Radelaar, P. Balk

Journal:

Journal of Crystal Growth

Year:

1994

Language:

english

File:

PDF, 444 KB

english, 1994

30

Determination of the sticking coefficient of disilane on Si(001) using the first reflection high energy electron diffraction oscillation period

K. Werner, S. Butzke, S. Radelaar, P. Balk

Journal:

Journal of Crystal Growth

Year:

1994

Language:

english

File:

PDF, 496 KB

english, 1994

31

Roughening of SiGe layers grown with gas-source MBE: dependence on Ge concentration and growth temperature

A.B. Storm, P.W. Lukey, K. Werner, J. Caro, S. Radelaar

Journal:

Journal of Crystal Growth

Year:

1995

Language:

english

File:

PDF, 294 KB

english, 1995

32

Gas source MBE growth of SiSiGe device materials

K. Werner, A. Storm, S. Butzke, J.W. Maes, M. van Rooy, P. Alkemade, E. Algra, M. Somers, B. de Lange, E. van der Drift, T. Zijlstra, S. Radelaar

Journal:

Journal of Crystal Growth

Year:

1996

Language:

english

File:

PDF, 1.03 MB

english, 1996

33

The kinetics of short-range ordering in a Cu-Al (14.9 at.%) alloy

Journal:

Journal of Physics and Chemistry of Solids

Year:

1966

Language:

english

File:

PDF, 305 KB

english, 1966

34

On the relation between the relaxation time for short-range order and self-diffusion coefficients

Journal:

Journal of Physics and Chemistry of Solids

Year:

1970

Language:

english

File:

PDF, 679 KB

english, 1970

35

The kinetics of short range ordering in a Cu-Al (14.9 at %) alloy

Journal:

Solid State Communications

Year:

1966

Language:

english

File:

PDF, 117 KB

english, 1966

36

On the relation between the relaxation time for short-range order and self-diffusion coefficients

Journal:

Solid State Communications

Year:

1969

Language:

english

File:

PDF, 235 KB

english, 1969

37

Editorial

Sybrand Radelaar

Journal:

Microelectronic Engineering

Year:

1988

Language:

english

File:

PDF, 39 KB

english, 1988

38

On double layer PMMA resist systems: Development rates and molecular weight distributions of commercial PMMA resists

A.H. Verbruggen, B.G.M. de Lange, B.A.C. Rousseeuw, H.A.H. Billiet, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1990

Language:

english

File:

PDF, 283 KB

english, 1990

39

Fabrication of 35 nm linewidth gold rings and observation of h/e and h/2e magnetoconductance oscillations

A.H. Verbruggen, P.A.M. Holweg, H. Vloeberghs, C. Van Haesendonck, J. Romijn, S. Radelaar, Y. Bruynseraede

Journal:

Microelectronic Engineering

Year:

1991

Language:

english

File:

PDF, 301 KB

english, 1991

40

A study of dry etching mechanisms in CL2 by ion energy analysis at the rf-electrode

A. Manenschijn, E. van der Drift, G.C.A.M. Janssen, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1991

Language:

english

File:

PDF, 270 KB

english, 1991

41

High contrast marks for e-beam direct write made by reactive ion etching

M.N. Webster, A.H. Verbruggen, H.F.F. Jos, J. Romijn, P.M.A. Moors, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1992

Language:

english

File:

PDF, 282 KB

english, 1992

42

Proximity effect in high voltage electron beam lithography on Ti/Pt/Au metallization

M.N. Webster, A.H. Verbruggen, J. Romijn, H.F.F. Jos, P.M.A. Moors, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1992

Language:

english

File:

PDF, 355 KB

english, 1992

43

Ultra-high-resolution negative e-beam resist: AlF3

H.R. Borsje, H.M. Jaeger, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1992

Language:

english

File:

PDF, 311 KB

english, 1992

44

Fabrication of submicron microwave bipolar transistors by direct write electron beam lithography

M.N. Webster, A.H. Verbruggen, J. Romijn, H.F.F. Jos, P.M.A. Moors, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1992

Language:

english

File:

PDF, 349 KB

english, 1992

45

Dual-gate nanostructured silicon MOSFETs: fabrication and low temperature characterization

C. de Graaf, J. Caro, K. Heyers, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1993

Language:

english

File:

PDF, 341 KB

english, 1993

46

Fabrication of Si-coupled three terminal superconducting device using selective deposition of β-W

S.J.M. Bakker, B.A.C. Rousseeuw, E. van der Drift, T.M. Klapwijk, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1993

Language:

english

File:

PDF, 297 KB

english, 1993

47

Patterning of a Ti/Pt/Au metallization for submicron bipolar transistors made by direct write e-beam lithography

M.N. Webster, A.H. Verbruggen, H.F.F. Jos, J. Romijn, P.M.A. Moors, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1993

Language:

english

File:

PDF, 417 KB

english, 1993

48

Fabrication of single-crystalline aluminum nanostructures

A.W. Fortuin, M. van der Kolk, T. Zijlstra, A.H. Verbruggen, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 760 KB

english, 1995

49

Nanofabrication of Si point contacts using gas-source MBE: towards single-crystalline devices

J.W.H. Maes, W. Heuvelman, J. Caro, K. Werner, H.W. Zandbergen, S. Radelaar

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 931 KB

english, 1995

50

Fabrication of 100 nm polysilicon-emitter transistors using e-beam lithography

M.N. Webster, A. Tuinhout, A.H. Verbruggen, J. Romijn, S. Radelaar, B. Lo¨chel, H.F.F. Jos, P.M.A. Moors

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 862 KB

english, 1995

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